| 发明名称 |
APPARATUS FOR DEPOSITING BARRIER FILM ON THREE-DIMENSIONAL ARTICLES. |
| 摘要 |
The invention to an apparatus for use in a Plasma Enhanced chemical Vapor Deposition (PECVD) process whereby a coating of inorganic material is deposited three-dimensional articles, including low melting temperature polymer articles. The coating possesses excellent gas and/or water vapor barrier properties.
|
| 申请公布号 |
MX9706656(A) |
申请公布日期 |
1998.08.30 |
| 申请号 |
MX19970006656 |
申请日期 |
1997.09.02 |
| 申请人 |
BECTON, DICKINSON AND COMPANY |
发明人 |
DAVID B. MONTGOMERY |
| 分类号 |
C08J7/04;C08J7/00;C08J7/18;C23C16/50;C23C16/509;H01J37/32;(IPC1-7):A61J1/00 |
主分类号 |
C08J7/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
