MANUFACTURE OF COMPOUND-SEMICONDUCTOR SINGLE CRYSTAL,申请号JP19970103106-传众专利搜索

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发明名称	MANUFACTURE OF COMPOUND-SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号	JPH10294324(A)	申请公布日期	1998.11.04
申请号	JP19970103106	申请日期	1997.04.21
申请人	JAPAN ENERGY CORP	发明人	SEKI YOJI;ODA OSAMU
分类号	C30B1/10;C30B29/48;H01L21/203;H01L21/363;(IPC1-7):H01L21/363	主分类号	C30B1/10
代理机构		代理人
主权项
地址

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