FEEDING METHOD OF SOLID MATERIAL

摘要

PROBLEM TO BE SOLVED: To feed a solid material quantitatively and stationarily by vaporizing the whole quantity of the solid material mechanically fed with a quantitative particulate matter feeding device in a vaporization mixing container and mixing diluent gas. SOLUTION: Enough temp. to enable to vaporize the whole quantity of the solid material fed in a form of particulates in the vaporization mixing container is kept and besides a mixing space volume of the vaporized vapor with the diluent gas enough to sufficiently reduce a variation of a feed flow rate of the particulate matter feeding device is secured. The temp. of the vaporization mixing container and the volume are decided as follows: a flow rate of the diluent gas is defined as S(cm<3> /min) and the vapor pressure of the solid material (molecular weight M) as temp. T ( deg.C) is as PT (MPa), then a vaporizing speed WT (g/min) of the solid material is represented by formula I. A heating temp. TA ( deg.C) of the vaporizer is preferred to be about 50 deg.C higher than T as shown by formula II. A volume V (cm<3> ) of the vaporization mixing container is represented by formula III, when a feed variation period of the particulate matter feed device is defined as D (sec). formula I; WT=(Pr /0.1013)×(S /22400)×M formula II; TT=T+50, formula III; V>=5×D×S.