| 摘要 |
The invention relates to a device (1) for detecting electronic defects in the edge region of semiconductors (2), which have a flat surface having first and second edge regions (3, 4) spaced apart from each other in parallel with each other, which has an illuminating apparatus (7) for illuminating the semiconductors (2) with an optical excitation radiation (8), by means of which the semiconductors (2) can be excited to emit a photoluminescence radiation (9). The device (1) has a measuring apparatus (18), which has at least a first and a second semiconductor sensor (21, 22). The first sensor (21) is provided for sensing photoluminescence radiation (9) at a first detection point (12), and the second sensor (22) is provided for sensing photoluminescence radiation (9) at a second detection point (13), which is spaced apart from the first detection point (12). By means of a positioning apparatus (28), the semiconductors (2) can be positioned with the first edge region (3) thereof at the first detection point (12) and with the second edge region (4) thereof at the second detection point (13) and can be moved in relation to the detection points (12, 13) in a transport direction (29) oriented parallel to the edge regions (3, 4). In order to detect the defects in accordance with the measurement signals of the sensors (21, 22), an evaluating apparatus (35) is connected to the sensors. The sensors (21, 22) are arranged on separate semiconductor chips. |
