发明名称 ELECTRIC FIELD EMITTING ELECTRON SOURCE AND PRODUCTION METHOD THEREFOR
摘要 The purpose of the present invention is to provide an electric field emitting electron source using a hexaboride single crystal having stable electron emission characteristics. The electric field emitting electron source (20) is configured such that a tip work piece (15) is cut out from a single crystal growth body (13) of hexaboride grown in a melt (liquid phase), and the forward extremity thereof in the length direction is sharpened and cleaned in order to form a crystal face terrace (facet) formed orthogonally to a crystallographic axis.
申请公布号 WO2016167048(A1) 申请公布日期 2016.10.20
申请号 WO2016JP57109 申请日期 2016.03.08
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 KUSUNOKI Toshiaki;NAKAYAMA Takeshi;YAMAMOTO Hiroyuki;HASHIZUME Tomihiro;YAMAMOTO Kenichi;SAKAI Yusuke;MURAKOSHI Hisaya;OSE Yoichi
分类号 H01J1/304;H01J1/30;H01J9/02 主分类号 H01J1/304
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