发明名称 |
ELECTRIC FIELD EMITTING ELECTRON SOURCE AND PRODUCTION METHOD THEREFOR |
摘要 |
The purpose of the present invention is to provide an electric field emitting electron source using a hexaboride single crystal having stable electron emission characteristics. The electric field emitting electron source (20) is configured such that a tip work piece (15) is cut out from a single crystal growth body (13) of hexaboride grown in a melt (liquid phase), and the forward extremity thereof in the length direction is sharpened and cleaned in order to form a crystal face terrace (facet) formed orthogonally to a crystallographic axis. |
申请公布号 |
WO2016167048(A1) |
申请公布日期 |
2016.10.20 |
申请号 |
WO2016JP57109 |
申请日期 |
2016.03.08 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
KUSUNOKI Toshiaki;NAKAYAMA Takeshi;YAMAMOTO Hiroyuki;HASHIZUME Tomihiro;YAMAMOTO Kenichi;SAKAI Yusuke;MURAKOSHI Hisaya;OSE Yoichi |
分类号 |
H01J1/304;H01J1/30;H01J9/02 |
主分类号 |
H01J1/304 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|