METHOD OF MANUFACTURING OPTICAL WAVEGUIDE DEVICE USING INDUCTIVELY COUPLED PLASMA SYSTEM

摘要

A method of manufacturing an optical waveguide device using an inductively coupled plasma device is provided. In this method, a lower cladding layer and a core layer are sequentially formed on a substrate. A mask pattern is formed on the core layer. The substrate is loaded on a cathode electrode of an inductively coupled plasma system. A plasma from a reaction gas is generated by applying first and second RF power respectively to the cathode electrode and an inductively coupled plasma coil, to pattern an exposed core layer into an optica l waveguide. Then, an upper cladding layer covering the optical waveguide is formed.