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经营范围
发明名称
System zur Elektronstrahlabscheidung aus der Gasphase
摘要
申请公布号
DE69602131(D1)
申请公布日期
1999.05.27
申请号
DE19966002131
申请日期
1996.02.09
申请人
JET PROCESS CORP., NEW HAVEN, CONN., US
发明人
HALPERN, BRET, BETHANY, CT 06525, US
分类号
C23C14/22;C23C14/32;H01J37/305;(IPC1-7):C23C14/22;H01J37/00
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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