Vertical differential resonator

摘要

A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.

主权项

1. A micromechanical device comprising:
a substrate; a plurality of support structures anchored to the substrate; a micromechanical structure supported by the substrate via the plurality of support structures and configured for overtone resonant vibration relative to the substrate, the overtone resonant vibration having a set of nodal points along the micromechanical structure; and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps, the plurality of electrodes comprising multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, and further comprising multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration; wherein:
the plurality of support structures are coupled to the micromechanical structure between ends of the micromechanical structure;each support structure of the plurality of support structures is disposed at a respective nodal point of the set of nodal points;the multiple drive electrodes comprise a positive drive electrode and a negative drive electrode; andthe multiple sense electrodes comprise a positive sensing electrode and a negative sensing electrode.