Passivierungsverfahren für eine ferroelektrische integrierte Schaltung, das harte keramische Materialien benutzt

摘要

Method of passivating a surface of an integrated circuit by; a) completely fabricating ferroelectric devices in the circuit, b) depositing a passivation layer over the entire surface comprising a ceramic material selected from doped and undoped titanates, zirconates, niobates, tantalates, stannates, hafnates, and manganates and having a Mohs hardness rating of 7 or over.