POWER SUPPLY FOR SPUTTER ION PUMP,申请号JP19970350539-传众专利搜索

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发明名称	POWER SUPPLY FOR SPUTTER ION PUMP
摘要
申请公布号	JPH11185694(A)	申请公布日期	1999.07.09
申请号	JP19970350539	申请日期	1997.12.19
申请人	JEOL LTD	发明人	SHIRAKAWA AKIRA
分类号	H01J41/12;(IPC1-7):H01J41/12	主分类号	H01J41/12
代理机构		代理人
主权项
地址

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