发明名称 Method of isolating vibration in exposure apparatus
摘要 A method is provided for suppressing vibration of a body supported by an anti-vibration mount having a predetermined damping coefficient and a predetermined spring constant. The method includes the steps of applying a predetermined force to the body, detecting motion of the body generated in response to the predetermined force, and deriving a mechanical constant of the body from the damping coefficient and the spring constant of the anti-vibration mount and the detected motion of the body generated in response to the predetermined force. The method further includes the steps of monitoring the vibration of the body, and exerting a controlling force to the body in accordance with the monitored vibration of the body and the derived mechanical constant of the body to suppress the vibration of the body.
申请公布号 US5931441(A) 申请公布日期 1999.08.03
申请号 US19970807902 申请日期 1997.02.27
申请人 NIKON CORPORATION 发明人 SAKAMOTO, HIDEAKI
分类号 F16F15/02;G03F7/20;(IPC1-7):F16M13/00 主分类号 F16F15/02
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