| 摘要 |
<p>A mass sensor (30) comprising a coupling board (33) and a diaphragm (31) bonded to each other on the side faces thereof, a detection plate (32) bonded to the coupling board (33) on the side faces thereof in the direction orthogonal to the bonding direction of the diaphragm (31) and the coupling board (33), and a piezoelectric element (35) comprising a piezoelectric film and an electrode arranged at least on one planar surface of the detection plate (32), wherein a resonance section comprising the diaphragm (31), the detection plate (32), the coupling board (33) and the piezoelectric element (35) is bonded to a sensor substrate (34). Variation in the mass of the diaphragm (31) is measured by measuring variation in the resonance frequency at the resonance section due to variation in the mass of the diaphragm (31). Micromass on the nanogram order of a microorganism e.g. a bacteria or a virus, a chemical substrate or a deposition film can be measured easily and accurately.</p> |
