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发明名称
VACUUM CHAMBER
摘要
申请公布号
JPH11297499(A)
申请公布日期
1999.10.29
申请号
JP19980096042
申请日期
1998.04.08
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
TSUCHIYA MASAO
分类号
H05H7/14;(IPC1-7):H05H7/14
主分类号
H05H7/14
代理机构
代理人
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