MEMS actuator with discretely controlled multiple motions

摘要

A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

主权项

1. A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprising:
a) a bottom layer having control circuitry; b) at least one stepper plate having a plurality of stepper plate electrodes, wherein the stepper plate is configured to have a plurality of pre-programmed rotations by activating predetermined sets of the stepper plate electrodes; and c) a motion plate having a plurality of motion plate bottom supports, wherein one end of each motion plate bottom support is disposed on the bottom side of the motion plate and the other end of each motion plate bottom support is configured to have a distance from the stepper plate before the stepper plate is actuated and be capable of contacting the stepper plate when the stepper plate is actuated;wherein each rotation of the stepper plate makes the stepper plate contact at least one of the motion plate bottom supports of the motion plate, which makes the motion plate have a motion, wherein the motions of the motion plate are pre-programmed by the motion plate bottom supports and the stepper plate, wherein each of the pre-programmed motions plate is provided by actuating a predetermined set of the stepper plates.