CONTROL SYSTEM OF A SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: A control system of a semiconductor fabrication equipment is provided to improve an equipment management by installing a separate interlock sensor which receives an input/output parameter from a central processing unit and an auxiliary central processing unit. CONSTITUTION: The control system of a semiconductor fabrication equipment comprises: an operator(20) for applying various control signals for a semiconductor diffusion process; a central processing unit(22) for storing a control signal from the operator to apply the received signal to an auxiliary equipment; an auxiliary central processing unit(24) connected to the central processing unit, for performing an auxiliary role; a load unit(26) operative in response to the signal from the auxiliary central processing unit; a comparison interlock sensor(28) for comparing the signal applied to the central processing unit, the auxiliary central processing unit and the load unit with a signal transferred up to the load unit, and for sensing an abnormal signal generation; a parameter input unit(30) for applying an external utility to the auxiliary central processing unit; and an input parameter sensor(32) for comparing the signal supplied from the input parameter to sense whether or not an abnormal signal is generated.