METHOD FOR MANUFACTURING A LASER DIODE

摘要

PURPOSE: A fabrication method of laser diodes is provided to improve a reliability of the laser diode by exact controlling a relative quantity of reactive gas when growing a low reflective thin film. CONSTITUTION: In the growing method of low reflective thin film, the reactive gases are used as a predetermined mixing gas mixed a constant ratio. The mixing gas is controlled as a single gas using a separate gas cylinder(50) and a separate MFC(mass flow controller)(52a). Thereby, the relative reaction gas quantity of the systems is exactly controlled together with a CFC(52b) and then the exactly controlled reactive gases are flow in a vacuum chamber through a gas inlet(54).