Double Si/SiO2 coatings produced by laser

摘要

Double Si/SiO2 coatings produced by laser. Silicon/silicon oxide coatings can be applied to different materials and components by means of a method based on laser-induced chemical vapour deposition (LCVD). This method makes use of an ArF exciter laser to irradiate different precursor gas mixtures introduced in a reaction chamber in which a high vacuum has previously been created. The flexibility of this method makes it possible to control the physical and chemical properties and thickness of the coatings, and is of special application in the protection of metal materials against attack by external agents, fundamentally when the said components are subjected to high temperatures and very aggressive atmospheres.