MICROLENS FORMATION METHOD OF SOLID-STATE COLOR IMAGING DEVICE

摘要

PURPOSE: A micro-lens formation method of solid-state color imaging device is provided to form micro-lens with high curvature and reduce a focal length and a thickness of interlayer and increase efficiency of light collection and maintain an interval of micro-lens constantly. CONSTITUTION: The micro-lens formation method of solid-state color imaging device comprises the steps of forming a photo diode in a semiconductor board; forming a photo shield film, a first flat layer, and a second flat layer sequentially; forming a pattern of micro-lens on the second flat layer; filling flowing material to a gap of micro-lens pattern; and thermal flow the micro-lens pattern. The first and second flat layer is an insulating film. The micro-lens pattern is a convex lens pattern and flowing material is filled by the spin coating method.