| 摘要 |
PROBLEM TO BE SOLVED: To provide a direct probe causing no overshoot for probe temperature at controlling of probe temperature over a wide range. SOLUTION: This direct probe is formed of a probe 5 having a heater circuit 6 and a temperature measuring means 7, a reference signal source 1 for setting probe temperature, an error amplifier 2 for making a comparison between set temperature and actual probe temperature, a control circuit 3 for controlling power supply to the heater circuit 6 and a power amplifier 4 for supplying power to the heater circuit 6 according to a control signal from the control circuit 3. In this case, a current limiter 9 is provided for limiting current which is fed to the heater circuit 6.
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