| 摘要 |
PURPOSE: An apparatus for directing the status of a lamp in wafer inspection equipment is provided to reduce the inspection error by detecting the voltage of a sensor to determine the changing time of the lamp. CONSTITUTION: A display unit(10) comprises an amplifier(12) amplifying the signal sensed by sensor, transistors(Q1¯Q9) connected with the amplifier via resistors(R10¯R18), and diodes(D1¯D8) connected between the resistors(R10¯R18) respectively. A plurality of light emission diodes(LED1¯LED9) connects to a voltage source(Vs), and connects to each collector of the transistor( Q1¯Q9). According to the signal amplified by the amplifier(12), it is determined whether the transistors(Q1¯Q9) are on or off. The light emission diodes(LED1¯LED9) are on or off in response to the operation of the transistors(Q1¯Q9). The light emission diodes(LED1¯LED9) emit light to display the voltage level sensed by sensor.
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