| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for improving an accuracy of a preload given to a piezoelectric element.SOLUTION: A manufacturing method of a pressure sensor has a cylindrical housing formed with a support plate in a lid-shape on one end side, a piezoelectric element for outputting an electrical signal corresponding to a pressure received by a diaphragm, and a rod like transmission part which transmits the pressure to the piezoelectric element, and includes: a storing step of storing the piezoelectric element inside the housing; and a transmission part fixing step of fixing a transmission part to the housing via the diaphragm in a state that the piezoelectric element is pushed to the support plate by the transmission part and the piezoelectric element is given with a predetermined preload in the axial direction of the housing.SELECTED DRAWING: Figure 5 |
