Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface

摘要

Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer:
a) formation of a first layer, at least part of which is porous,b) formation on the first layer of a layer made of one (or several) materials providing the mechanical properties of the structure, called the intermediate layer,c) formation on the intermediate layer of a second layer, at least part of which is porous,d) formation of said structure in the stack composed of the first layer, the intermediate layer and the second layer,e) release of said structure by at least partial removal of the sacrificial layer.

主权项

1. Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer:
a) formation of a first layer on the sacrificial layer, at least part of the first layer being porous; b) formation, on the first layer, an intermediate layer configured to provide the mechanical properties of the structure; c) formation of a second layer on the intermediate layer to provide a stack including the first layer, the intermediate layer and the second layer, at least part of the second layer being porous; d) formation of said micromechanical and/or nanomechanical structure in the stack composed of the first layer, the intermediate layer and the second layer; and e) release of said structure by at least partial removal of the sacrificial layer.