发明名称 Optical element with alignment mark, and optical system having such optical element
摘要 <p>A diffractive optical element having a design wavelength lambda , includes a diffractive surface for diffracting predetermined light corresponding to the design wavelength, and a mark shaped so that, with regard to the predetermined light, a phase difference corresponding to a multiple, by an integer, of the design wavelength lambda is produced between (i) a light ray, of the predetermined light, as transmitted through or reflected by the mark and (ii) a light ray, of the predetermined light, as transmitted through or reflected by a portion adjacent to the mark, and that, with regard to second light of a second wavelength lambda ' different from the design wavelength lambda , no phase difference corresponding to a multiple, by an integer, of the second wavelength lambda ' is produced between (a) a light ray, of the second light, as transmitted through or reflected by the mark and (b) a light ray, of the second light, as transmitted through or reflected by a portion adjacent to the mark. &lt;IMAGE&gt; &lt;IMAGE&gt;</p>
申请公布号 EP1001301(A2) 申请公布日期 2000.05.17
申请号 EP19990308877 申请日期 1999.11.08
申请人 CANON KABUSHIKI KAISHA 发明人 TSUJI, TOSHIHIKO
分类号 G02B5/18;G02B7/00;G02B27/62;(IPC1-7):G02B27/32 主分类号 G02B5/18
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