MANUFACTURE OF SEMICONDUCTOR LASER

摘要

PROBLEM TO BE SOLVED: To improve reliability at high output operation, by reducing corruption of optical damage(COD) at an edge face of resonator. SOLUTION: This manufacturing method for a semiconductor laser, in which a resonator edge face 110 of the semiconductor laser is coated with a protective film 340, includes a cleaning step for removing contaminations on the resonator edge face 110 with low damage and cleaning the resonator edge face 110, and a depositing step for depositing the protective film 340 with low damages on the cleaned edge face 110.