| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of preventing relative displacement between a sample stage and an object lens by external vibration, and scratches on the object lens. SOLUTION: This scanning electron microscope has an objective lens 121 and a sample stage which moves a sample holder 103 to and from at least against the objective lens 121. A flange 151 (abutted means) is attached on the objective lens 121 side as a separate body, and a locking flange (abutting means) 171 capable of abutting with the flange 151 is provided on the sample holder 103 side.
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