发明名称 Copper ball bond features and structure
摘要 An integrated circuit wire bond connection is provided having an aluminum bond pad (51) that is directly bonded to a copper ball (52) to form an aluminum splash structure (53) and associated crevice opening (55) at a peripheral bond edge of the copper ball (54), where the aluminum splash structure (53) is characterized by a plurality of geometric properties indicative of a reliable copper ball bond, such as lateral splash size, splash shape, relative position of splash-ball crevice to the aluminum pad, crevice width, crevice length, crevice angle, and/or crevice-pad splash index.
申请公布号 US9461012(B2) 申请公布日期 2016.10.04
申请号 US201414557769 申请日期 2014.12.02
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 Higgins, III Leo M.;Lee Chu-Chung
分类号 H01L23/49;H01L21/607;H01L21/603;H01L23/485;H01L23/00 主分类号 H01L23/49
代理机构 代理人
主权项 1. An integrated circuit wire bond connection comprising: a copper bond wire comprising a copper ball and an aluminum bond pad that is directly bonded to the copper ball to form an aluminum splash structure and associated crevice opening between the aluminum splash structure and copper ball at a peripheral bond edge of the copper ball, where the aluminum splash structure is characterized by a first plurality of geometric features indicative of a reliable copper ball bond comprising: a splash height measure of the vertical distance from a top surface of the aluminum bond pad to a top surface of the aluminum splash structure that is less than half a ball bond height measure for the copper ball and more than half an original pad thickness measure for the aluminum bond pad; and a gap height measure of the vertical distance from a lowest point of the crevice opening to the top surface of the aluminum splash structure that is less than eighty percent of the splash height measure.
地址 Austin TX US
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