| 摘要 |
PROBLEM TO BE SOLVED: To make certainly suppressible an increase in effective output even if a washing fluid is reduced and to easily enable the extension of length in matching relation to the size of an article to be washed without exerting adverse effect such as attenuation or the like on transmitted ultrasonic vibration. SOLUTION: Grooves are formed on both side surface 9a of a waveguide member 9 longitudinally and cooling pipes 8 are fitted in these grooves to constitute the cooling means of the waveguide member 9. A vibrator 7 is arranged inside between the mutual grooves. By this constitution, the cooling means having the length corresponding to the length L of the waveguide member 9 can be formed easily in low cost and the ultrasonic vibration generated from the vibrator 7 can be prevented from receiving adverse effect such as attenuation or the like.
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