发明名称 |
Column for charged particle beam device |
摘要 |
<p>A charged particle beam column comprises: a particle source (12); an objective lens (20); a pre-lens deflection unit (30) for deflecting a beam of charged particles away from the optical axis (16) on such a path (14b,14c) that the combined action of the objective lens (20) and the pre-lens deflection unit (30) directs the beam of charged particles towards the optical axis (16) to hit the specimen surface (18) from a first direction; and an in-lens deflection unit (40) arranged in the vicinity of the objective lens (20) for redirecting the deflected beam of charged particles on such a path (14d) that the combined action of the objective lens (20) and the in-lens deflection unit (40) redirects the beam of charged particles towards the optical axis (16) to hit the specimen surface (18) under said large beam landing angle from a second direction substantially opposite to said first direction. <IMAGE></p> |
申请公布号 |
EP1045426(A2) |
申请公布日期 |
2000.10.18 |
申请号 |
EP20000108410 |
申请日期 |
2000.04.17 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GMBH |
发明人 |
ADAMEC, PAVEL |
分类号 |
G01B15/00;G01B15/08;H01J37/12;H01J37/141;H01J37/145;H01J37/147;H01J37/28;(IPC1-7):H01J37/28;H01J37/30 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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