| 摘要 |
PROBLEM TO BE SOLVED: To accurately align irradiating positions of a neutralizing energy beam 25a and an ion beam 39, in a focused ion beam apparatus. SOLUTION: A neutralizing energy beam is irradiated onto a sample 37, to form a reflecting region 37a caused to reflect the irradiation range of a neutralizing energy beam onto the sample. The sample having the reflecting region formed thereon is scanned with an ion beam to find a coordinate information on a scan coordinate axis of the ion beam as coordinated information, indicative of a range of the reflection region. On the basis of the coordinated information found, it is decided whether the irradiation range of the energy beam satisfies a positional relationship allowable for a predetermined irradiation point of the ion beam. When it is decided that the relationship is not satisfied, the irradiated region of the energy beam is changed, on the basis of the found coordinate information to satisfy the positional relation.
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