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发明名称
METHOD FOR ONE-SHOT REMOVAL OF RESIST MEMBER AND SIDEWALL PROTECTION LAYER
摘要
申请公布号
KR20000071038(A)
申请公布日期
2000.11.25
申请号
KR1019997007305
申请日期
1999.08.12
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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