发明名称 |
VERTICAL HEAT TREATMENT DEVICE AND DOOR ATTACHING/ DETACHING DEVICE THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To enhance the durability of a sealant and 4e maintain the airtightness of a device by preventing rubbing of a sealant when a door is opened and closed. SOLUTION: In this vertical heat treatment device, a maintenance access opening 2 is provided in the rear of a casing 1 and a door 4 is provided for hermetically closing the access opening 2 via a sealant 3. The door 4 has on one side an arm 10 extending outward of the casing 1 at approximately right angles thereto and the end of the arm 10 is freely rotationally attached to the casing 1 via a hinge 11. The arm 10 has a sliding mechanism 12 which enables the door 4 to slide in the direction opposite to the access opening 2 in order to press the sealant 3 parallel thereto.
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申请公布号 |
JP2001003655(A) |
申请公布日期 |
2001.01.09 |
申请号 |
JP19990178313 |
申请日期 |
1999.06.24 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
WATANABE SHINGO;INATOMI YASUHIRO;NAKANO TETSUYA;HASEGAWA KOSUKE |
分类号 |
E06B7/16;H01L21/22;(IPC1-7):E06B7/16 |
主分类号 |
E06B7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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