发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to reduce efficiently the wiring capacity in a wiring structure including a dummy wiring for flattening an interlayer dielectric. CONSTITUTION: An N-type source and a drain region are formed on a P-type silicon substrate(1) by using a photo-lithography process and an ion implantation process. An MOS-type transistor is formed thereon by growing the first interlayer dielectric(7). A contact hole is formed on the first interlayer dielectric(7). A plug conductor is formed by burying the contact hole. The second interlayer dielectric(10) is grown on the first interlayer dielectric(7). A trench(11) is formed on the second interlayer dielectric(10). A conductive layer is formed on the second interlayer dielectric(10). The first wiring(8), the second wiring(9), and a dummy wiring(18) are formed thereon. The third interlayer dielectric is grown on a whole face of the second interlayer dielectric(10).
申请公布号 KR20010014640(A) 申请公布日期 2001.02.26
申请号 KR20000015792 申请日期 2000.03.28
申请人 NEC CORPORATION 发明人 IGUCHI MANABU
分类号 H01L23/52;H01L21/304;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768 主分类号 H01L23/52
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