PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATING APPARATUS

摘要

A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.

主权项

1. A piezoelectric vibrator comprising:
a piezoelectric film having first and second surfaces that oppose each other; a first electrode opposing the first surface of the piezoelectric film; a second electrode opposing the second surface of the piezoelectric film; a first adjustment film disposed above a first region of the piezoelectric film with the first electrode interposed between the first adjustment film and the piezoelectric film; and a second adjustment film disposed above the first adjustment film to cover only a second region of the piezoelectric film that is different from the first region of the piezoelectric film, wherein the second region of the piezoelectric film has a greater displacement than the first region of the piezoelectric film when the piezoelectric vibrator vibrates.