Mounting system that maintains stability of optics as temperature changes

摘要

An optical system comprises a detector to determine one or more intensities of light impinging on one or more locations of the detector and an optical element to redirect light towards the detector along a detection axis. The detector and optical element are coupled together by three or more substantially flat flexures respectively defining three or more flexure planes parallel to the detection axis.

主权项

1. A scanner comprising:
a light source to generate light; a microlens array to split the light into an array of light beams; a base; a detector, mounted to the base, comprising an array of sensors, wherein each sensor of the array of sensors determines an intensity of light impinging on the sensor; and a beam splitter to transmit the array of light beams towards a target and redirect a reflected array of light beams from the target towards the detector along a detection axis in a first direction, wherein the beam splitter is coupled to the base by three or more flexures, and wherein thermal expansion or contraction of the beam splitter with respect to at least one of the detector or the base bends each flexure of the three or more flexures in a second direction radiating from the detection axis without bending the flexure in a third direction perpendicular to the first direction and the second direction, wherein the three or more flexures maintain an alignment of the microlens array to the detector to a sub-micron level of accuracy.