WORKING DEVICE FOR OUTER PERIPHERAL PART OF WAFER

摘要

PROBLEM TO BE SOLVED: To attain relaxation in centering accuracy, improve working accuracy of an outer peripheral part and shorten working time or the like concerning a contouring type outer wafer peripheral part working device. SOLUTION: For this working device for outer peripheral part of a wafer, the contouring type outer wafer peripheral part working device is provided with a pressing means for relatively pressing a working tool to a wafer at a prescribed pressure.