PULSE-WIDTH MODULATION TYPE IONIZER CONTROLLER HAVING SELF-DIAGNOSIS FUNCTION AND COMMUNICATION FUNCTION

摘要

PURPOSE: A pulse-width modulation type ionizer controller having self-diagnosis function and communication function is provided to make administration of the ionizer easy after installation of the ionizer to semiconductor factory or texture factory. CONSTITUTION: An MPU(201) provides all commands, checks states of an ionizer controller periodically and outputs or updates state informations. A serial communication part(202) waits command from a main computer and sends the information corresponding to the command when the command is transferred. An error detecting part(204) detects error for peripheral circuits and connected ionizer. The ionizer controller use a pulse width modulation type control signal for adjusting generation amount of positive and negative ions.