| 摘要 |
<p>A micro-actuator including a skeleton (200) having flexible beams (210), a rotor portion (230), a stator portion (220), and a damping material (260). The flexible beams connect the rotor portion to the stator portion and the damping material is applied to the skeleton. The damping material provides a protective layer to the flexible beams of a micro-actuator. The damping material increases the damping characteristics of the micro actuator and limits the penetration of humidity into the skeleton of the micro actuator.</p> |
