发明名称 Flash memory and methods of writing and erasing the same as well as a method of forming the same
摘要 A flash memory is provided on a semiconductor substrate. A trench with corners is provided on a surface of the semiconductor substrate. A gate insulation film is provided on a surface within the trench. A floating gate is buried within the trench through the gate insulation film. A control gate is provided isolated from the floating gate, and also is characterized in that at the corners of the trench, corners of the floating gate face through the gate insulation film to edges of the semiconductor substrate, and if the control gate is made low potential whilst the semiconductor substrate is made high potential, then electrons are extracted from the corners of the floating gate.
申请公布号 US6317360(B1) 申请公布日期 2001.11.13
申请号 US19990387722 申请日期 1999.09.01
申请人 NEC CORPORATION 发明人 KANAMORI KOHJI
分类号 G11C16/04;H01L21/28;H01L21/336;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):G11C16/04 主分类号 G11C16/04
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