PROCESS AND SYSTEM FOR DETERMINING ACCEPTABILITY OF A FLUID DISPENSE

摘要

A process and system are provided for determining the acceptability of a fluid dispense such as a discrete volume of fluid (30) used to coat a substrate. The fluid dispense is exposed to an energy source (16, 24) and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor (18, 26) is used to control further processing of the substrate.