| 摘要 |
PURPOSE:To improve a yield in a plasma processing step for a flexible board, by making an overall length of the flexible board larger than that of an electrode in a plasma processing region. CONSTITUTION:A pair of flexible boards 1 laid one on top of another are continuously provided in a reaction chamber 30. Each board 1 wound around a roll 31 is provided back to back and put in a long turn-back line so that the rolled board 1 passes five times through an electric discharging region 35 between a pair of electrodes. The retention time of the board 1 in the plasma processing region 35 becomes five times as long as before. In addition, since the boards 1 are provided one on top of another, the overall system has an amount of throughput ten times as large as a conventional one. |
