| 摘要 |
PURPOSE: A wafer transfer robot for sensing a wafer is provided to sense if the wafer is normally placed in the end of a robot arm so that a wafer transfer defect is prevented, by installing sensors in the portion of a robot arm support which is located in a position adjacent to each corner of the triangular end part of the robot arm transferring the wafer between a cassette and a loadlock chamber. CONSTITUTION: A driving unit(51) vertically moves and horizontally rotates the support. The robot arm(53) horizontally moves back and forth the wafer(1), horizontally separated in parallel from the support(52) by a predetermined interval. A guide unit(55) horizontally moves back and forth along the side surface of the support to guide the movement of the robot arm, connected to the side portion of the robot arm as one body. The sensors(61,62,63) sense the wafer, installed in respective positions of the support adjacent to the end of the robot arm.
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