发明名称 ELECTRONIC COMPONENT COOLING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an electronic component cooling apparatus which can effectively cool a heat generating electronic component like an LSI chip and is smaller than the conventional equipment. SOLUTION: This electronic component cooling apparatus is provided with a ventilating hole 12 facing a temperature boundary layer above a heat dissipating surface 2 of an electronic component, a pressure chamber 18 interconnected with the ventilating hole 12, and a pressure changing means 17 for changing a pressure in the pressure chamber 18.
申请公布号 JP2002026214(A) 申请公布日期 2002.01.25
申请号 JP20000211547 申请日期 2000.07.12
申请人 SUMITOMO METAL IND LTD 发明人 TASAKA MASAHIRA
分类号 H01L23/467;(IPC1-7):H01L23/467 主分类号 H01L23/467
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