发明名称 METHOD FOR MANUFACTURING VERTICAL HEAT TREATMENT EQUIPMENT AND PLATELIKE HEAT INSULATOR THEREOF
摘要 PROBLEM TO BE SOLVED: To prevent a crack from breaking a platelike heat insulator to improve heat insulation and durability. SOLUTION: A vertical thermal treatment equipment 1, in which a heater 10 having a cylindrical heat insulator 11 is placed around an upright treatment container 2 for storing a plurality of bodies w to be treated and a platelike heat insulator 13 is placed on the barrel heat insulator 11 of the heater 10, comprises a plurality of cores 21 embedded into the platelike heat insulator 13.
申请公布号 JP2002025925(A) 申请公布日期 2002.01.25
申请号 JP20000204743 申请日期 2000.07.06
申请人 TOKYO ELECTRON LTD 发明人 KOBAYASHI SATOKI
分类号 C23C16/44;F27D1/00;F27D1/08;F27D1/18;H01L21/205;H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/22 主分类号 C23C16/44
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