发明名称 Method for manufacturing multi-kind and small quantity semiconductor products in a mass-production line and system thereof
摘要 A method for manufacturing multi-kind and small-quantity semiconductor products in a mass-production line and a system thereof are provided. One aspect of the present invention, there is provided the method for manufacturing a semiconductor device through a plurality of fabrication processing steps, each of the fabrication processing steps being carried out sequentially with a plurality of chips on a wafer based on a chip identification information formed on the wafer, the method comprises at least two steps sharing the chip identification information before at least one of the two steps is carried out, wherein the steps are not immediately neighbored with each other in fabrication processing sequence.
申请公布号 US2002017708(A1) 申请公布日期 2002.02.14
申请号 US20010956151 申请日期 2001.09.20
申请人 FUJITSU LIMITED 发明人 TAKAGI OSAMU;IIZUKA TSUNEO;HONDA TETSUROU;HONDA TAKUYA
分类号 G05B19/418;G06Q10/00;H01L21/66;H01L23/544;(IPC1-7):H01L21/66 主分类号 G05B19/418
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