| 摘要 |
PROBLEM TO BE SOLVED: To rapidly inspect the pulse width and delay time of a pulse signal with high accuracy. SOLUTION: A pulse generation circuit 1 is provided with a pulse adjustment circuit, for adjusting the pulse width and delay time of individual pulse signals at the output of the pulse signals and in inspection modes of the pulse signals, and the pulse adjustment circuit is given a common reference pulse signal. In the inspection mode of the pulse width, the pulse signals from the pulse adjustment circuit 11 are average with a low-pass filter of an averaging circuit 21, and the results are inputted into an inspection part 3. The resulting average level is compared with a standard value, corresponding to an inspection data to judge the propriety of the pulse width. In the inspection mode of the delay time, the pulse signals from the pulse adjustment circuit and a reference pulse signal are combined at the averaging circuit 21 and the combined signals are averaged with the low-pass filter. Then, the results are inputted into the inspection part 3. The resulting average level is compared with a standard value, corresponding to the inspection data to judge the quality of the delay time.
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