| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffraction element-reading method and device for improving reading accuracy. SOLUTION: In the method and device for reading the diffraction element, light emitted from a light source 17 is applied to a diffraction element 13 on a substance 11 to be inspected, diffraction light being generated from the diffraction element 13 is guided to a a light receiving element 19, and the diffraction element 13 is read based on output from the light receiving element 19. When a plane formed by the light axis of emission light and a normal line NL on a cross point on a diffraction element surface 13a of the light axis is set to a first plane D1, and a plane that includes the normal line NL and is perpendicular to the first plane D1 is set to a plane D2, a light reception surface 19a of the light receiving element 19 is set to the side of the light source 17 with the second plane D2 as a boundary.
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