OPTICAL INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an optical inspection apparatus wherein one rectilinear inspection region which scans the surface of a specimen is divided into a plurality of partial inspection regions so as to be sensed by line sensors allocated to the respective partial inspection regions. SOLUTION: Images of the partial inspection regions are turned by 90 deg. by using an optical system inside a plane which is substantially parallel to the surface of the specimen. As a result, one rectilinear inspection region is converted into a plurality of optical images which are separated from each other. Thereby, the line sensors which are housed in a package whose outside shape is larger than a sensor chip can be arranged easily.