发明名称 |
METHOD OF RECYCLING USED QUARTS GLASS-MADE FIXTURE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of easily recycling a quarts glass-made fixture used in a plasma generating apparatus. SOLUTION: This method of recycling the quarts glass-made fixture used in the plasma generating apparatus is characterized in that the quarts glass- made fixture is heated at a temperature of 500 deg.C or more.
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申请公布号 |
JP2002068765(A) |
申请公布日期 |
2002.03.08 |
申请号 |
JP20000259646 |
申请日期 |
2000.08.29 |
申请人 |
SHINETSU QUARTZ PROD CO LTD |
发明人 |
INAGI KYOICHI |
分类号 |
C03B20/00;H01L21/205;H01L21/302;H01L21/306;(IPC1-7):C03B20/00 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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