Isolation technique for pressure sensing structure

摘要

A pressure sensor in accordance with the invention comprises a die having pressure-sensing electrical components formed in a first side of the die. In one embodiment, a method of securing a cap to a silicon die is provided comprising forming a thin glass particle layer on a bonding area of the cap, heating the cap and the thin glass particle layer on the bonding area to form a substantially continuous glass layer on the bonding area, and heating the cap and silicon die to a temperature above the melting point of the glass to form a bond between the cap and the silicon die.