| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle detector capable of suppressing the disturbance of light caused by a flow of purge air to improve the signal to noise ratio of particle detection, and detecting a minute particle. SOLUTION: In this particle detector, the particle contained in a sample gas is detected while blowing the purge air Pa of clean gas to a laser medium 3 or a reflecting mirror 4 by use of a laser beam L resonated within a laser resonator 2. In addition to pin holes 16 for passing the laser beam La and the purge air Pa formed in plate members 8, 9, air holes 17 are formed on the plate members 8 and 9 as passages for passing the purge air Pa to an outlet 6.
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